Method for uniform growth of bi-layer transition metal dichalcogenide continuous films
US12385140B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 20, 2022 |
| Grant date | Aug 12, 2025 |
| Priority date | — |
| Expiry date | Mar 6, 2043 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B29/48
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A large-area, uniform, and continuous films of bi-layer transition metal dichalcogenide (TMDC) and preparation method comprises that the bi-layer TMDC continuous films are grown on a substrate through the merging of bi-layer domains; the top and bottom layers of the bi-layer domains have equal size and grow synchronously, which guarantees uniformity of the bi-layer films; the bi-layer domains were nucleated at the surface steps of the substrate which require a height no less than 0.8 nm; the bi-layer TMDCs films include molybdenum disulfide, tungsten disulfide, molybdenum diselenide, and tungsten diselenide, and the size of the bi-layer TMDC films reaches centimeter-level and above, limited only by the substrate size.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.