Integrated MEMS electrostatic micro-speaker device and system
US12389162B1 · kind B1 · utility
0Cited by
1References
40Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 21, 2023 |
| Grant date | Aug 12, 2025 |
| Priority date | — |
| Expiry date | Oct 23, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2499/11
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
In an example, the present invention provides a micro-speaker device. The device has a movable diaphragm device comprising a thickness of silicon or graphene material which has a first surface and a second surface opposite of the first surface and sensor to track position of the diaphragm. The device has a housing enclosing the movable diaphragm device, the electrode device and an encapsulation device. The electrode device can be part of a CMOS device with electronics integrated on to the device that converts input audio signal in to signal that electrostatically actuates the micro-speaker from one or more surfaces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.