Supporting structure, apparatus for supporting substrate and facility for processing substrate
US12390842B2 · kind B2 · utility
0Cited by
14References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2023 |
| Grant date | Aug 19, 2025 |
| Priority date | — |
| Expiry date | Dec 31, 2043 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B3/08
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A support structure, includes: a support plate supporting a substrate; a lower cover covering a lower portion of the support plate; and a catching unit comprising a concave-convex structure having portions corresponding to each other so that the support plate and the lower cover are rotated and assembled with each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.