Hybrid displacement measuring device
US12392599B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 11, 2025 |
| Grant date | Aug 19, 2025 |
| Priority date | — |
| Expiry date | Feb 11, 2045 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to the field of optics, in particular to a hybrid displacement measuring device, comprising a worktable to be measured, a grating ruler, a laser light source, a first beam splitting mirror, a first measuring assembly, and a second measuring assembly which comprises a first interferometer. A hybrid measuring approach that integrates grating and laser is proposed based on the advantages of the two measuring means. The grating ruler is used to perform long-distance measurement distal to the mirror, and the first interferometer is used to perform short-distance measurement proximal to the mirror, thereby solving the problem that it is difficult to guarantee both the range and the precision of displacement measurement of the worktable to be measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.