XPS sample holder, apparatus for X-ray photoelectron spectroscopy including the same and method for X-ray photoelectron spectroscopy using the same
US12392740B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 26, 2023 |
| Grant date | Aug 19, 2025 |
| Priority date | — |
| Expiry date | Dec 31, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/2273
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is an XPS sample holder including: a holder body configured to provide an inner space; a first voltage transmitting member that passes through a top surface of the holder body in a vertical direction; a second voltage transmitting member that passes through the top surface of the holder body in the vertical direction and is spaced apart from the first voltage transmitting member in a first direction that is a horizontal direction; an inner connection member disposed in the holder body and electrically connected to the first voltage transmitting member; a first electrode part disposed on the top surface of the holder body and connected to the first voltage transmitting member; and a second electrode part disposed on the top surface of the holder body and connected to the second voltage transmitting member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.