Optical imaging system, methods, systems, and computer programs

US12393011B2 · kind B2 · utility

Assignee

• LEICA MICROSYSTEMS CMS GMBH · DE

Inventors

• Kai RITSCHEL · Wetzlar, DE
• Mate BELJAN · Wetzlar, DE

Key dates

• Filing date: Nov 21, 2023
• Grant date: Aug 19, 2025
• Expiry date: Mar 11, 2044

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/26
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Embodiments of the present invention relate to an optical imaging system, and to methods, systems, and computer programs for such an optical imaging system. The methods comprise obtaining first image data of an imaging device of the imaging system, the first image data comprising a representation of a pattern. The methods comprise obtaining second image data of the pattern from the imaging device after the pattern has been displaced by a stage of the optical imaging system by a distance in a dimension defined relative to the stage. The methods comprise determining an offset between the patterns of the first and second image data in two dimensions. The methods comprise calculating a conversion parameter based on the offset and the distance. A first method comprises controlling a drive unit configured to displace the stage based on the conversion parameter.