Simulation method, simulation apparatus, film forming apparatus, article manufacturing method, and non-transitory computer-readable storage medium
US12393183B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 11, 2023 |
| Grant date | Aug 19, 2025 |
| Priority date | — |
| Expiry date | Apr 6, 2044 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F2113/22
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides a simulation method of predicting a behavior of a composition in processing of bringing the composition arranged on a first member into contact with a second member and forming a film of the composition on the first member, comprising: predicting the behavior of the composition in the processing; calculating a distribution of distortion that occurs in at least one of the first member and the second member in the processing; and displaying the distribution of distortion calculated in the calculating, wherein in the displaying, in a case where at least one piece of input information is selected from a plurality of pieces of input information used to predict the behavior of the composition, the at least one piece of input information is displayed to be superimposed as a two-dimensional image on the distribution of distortion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.