Liquid cell for electron microscope and manufacturing method thereof
US12394590B2 · kind B2 · utility
0Cited by
3References
17Claims
0Family size
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Key dates
| Filing date | Sep 29, 2022 |
| Grant date | Aug 19, 2025 |
| Priority date | — |
| Expiry date | Nov 26, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2003
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Provided is a liquid cell for an electron microscope according to an embodiment of the inventive concept, including a lower window layer, an upper window layer above the lower window layer, and a separation film disposed between the upper window layer and the lower window layer so as to separate the upper window layer and the lower window layer from each other. An upper space may be defined by the upper window layer and the separation film, and a lower space may be defined by the lower window layer and the separation film. The upper window layer, the lower window layer, and the separation film may include the same material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.