Patent · US Active

Magnetron target coupling and support device

US12394610B2 · kind B2 · utility

0Cited by

1References

19Claims

0Family size

Assignee

VON ARDENNE Asset GmbH & Co KG · DE

Inventors

Goetz Grosser · Dresden, DE
Steffen Mosshammer · Rabenau, DE
Klaus Schneider · Lappersdorf, DE
Thorsten Sander · Dresden, DE

Key dates

Filing date	Nov 11, 2022
Grant date	Aug 19, 2025
Priority date	—
Expiry date	Nov 16, 2043

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/347
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Disclosed herein are devices, methods, and systems related to a magnetron-target coupling that includes a target coupling flange, a shaft fixedly coupled to the target coupling flange on a face opposite the target coupling flange, and having a first linear bearing component on a face opposite the target coupling flange. The magnetron-target coupling also includes a communication interface having a first communication electrode and a second communication electrode that are electrically coupled to each other wherein the second communication electrode is fixedly attached to the target coupling flange on a side opposite the shaft, the target coupling flange being disposed between the first communication electrode and the second communication electrode. The first communication electrode is supported such that it may be moved toward and/or away from the second communication electrode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.