Compact hybrid acoustic wave filter structure
US12395152B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 27, 2023 |
| Grant date | Aug 19, 2025 |
| Priority date | — |
| Expiry date | Jan 10, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/68
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A compact, hybrid, acoustic wave filter structure is disclosed. In an aspect an apparatus comprises a substrate; a first, multi-layer metallization structure disposed above the substrate; a plurality of pillar structures disposed above, and electrically coupled to, the first metallization structure; a second metallization structure disposed above, an electrically coupled to, the plurality of pillar structures. An acoustic unit (AU) is disposed between the first and second metallization structures and adjacent to at least one of the pillar structures. The AU comprises a surface acoustic wave or bulk acoustic wave acoustic resonator that is electrically coupled to a capacitor and an inductor. The capacitor comprises a metal-insulation-metal capacitor that is formed from a portion of the first metallization structure and optionally also from at least one pillar structure and a portion of the second metallization structure. The inductor is comprised of a second portion of the first metallization structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.