Liquid injection device
US12397311B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 4, 2023 |
| Grant date | Aug 26, 2025 |
| Priority date | — |
| Expiry date | May 7, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6708
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A liquid injection device includes a nozzle, a moving element and a control valve. The nozzle has a channel, a bypass passage and a suck back passage. The channel penetrates through the nozzle for injecting a working fluid. The channel has a liquid outlet. The bypass passage has a first opening, a switch-on position and a switch-off position. The suck back passage has a second opening between the first opening and the liquid outlet. The first opening and the second opening communicate with the channel. The moving element is disposed in the bypass passage. The control valve is disposed on the nozzle and controls the moving element to switch between the switch-on position and the switch-off position to open or close the channel. A suck back pump sucks the working fluid remaining between the first opening and the liquid outlet when the moving element is located at the switch-off position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.