Method and apparatus for characterising an object
US12399121B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 4, 2021 |
| Grant date | Aug 26, 2025 |
| Priority date | — |
| Expiry date | Aug 31, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/4788
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for characterising an object, including: providing, via a support plane, coherent incident radiation at the object at each of a plurality of radiation configurations, detecting, at a detector, an intensity of radiation scattered by the object for each radiation configuration, and determining, via an iterative process, an object transmission function associated with the object in dependence on the detected intensity of radiation for each radiation configuration. The iterative process comprises estimating, for each radiation configuration, an entrance wave function and an exit wave function, a support constraint and a current estimate of the object transmission function, determining a ratio of a sum of intensities of the exit wave function for the plurality of radiation configurations to a sum of intensities of the entrance wave function therefor, and updating the estimate of the object transmission function in dependence on the determined ratio and an amplitude constraint.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.