Substrate inspection apparatus and substrate treatment system including the same
US12399134B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 19, 2023 |
| Grant date | Aug 26, 2025 |
| Priority date | — |
| Expiry date | Mar 4, 2044 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9501
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A substrate inspection apparatus inspecting substrates using a vision system, which includes a camera module and an illumination module, and a substrate treatment system including the substrate inspection apparatus are provided. The substrate treatment system includes: a first substrate treatment apparatus; a second substrate treatment apparatus; a transfer unit transporting a container with a plurality of substrates accommodated therein from the first substrate treatment apparatus to the second substrate treatment apparatus; and a substrate inspection apparatus inspecting the substrates, wherein the substrate inspection apparatus includes an illumination module, which illuminates in a direction where the substrates are located, a camera module, which acquires images related to the substrates when the substrates are illuminated, and a control module, which inspects the substrates based on the images.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.