Optical inspection tool and inspection method for inspecting multifaceted groove specimens
US12399135B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 5, 2022 |
| Grant date | Aug 26, 2025 |
| Priority date | — |
| Expiry date | Aug 25, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/956
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical inspection tool may include at least a first image capture unit and a second image capture unit for inspecting specimens having a substantially V-shaped grooves. The first image capture unit may be arranged in a first orientation so as to be directable towards a first angular surface of the V-shaped groove of each specimen. The second image capture unit may be arranged in a second orientation so as to be directable towards a second angular surface of the V-shaped groove of each specimen. The first image capture unit may be configured to capture images of defects and/or contamination on the first angular surface and the second image capture unit may be configured to capture images of defects and/or contamination on the second angular surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.