Patent · US Active

Vertical channel semiconductor device with ferroelectric-insulator gate stack

US12402321B2 · kind B2 · utility

0Cited by
19References
21Claims
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Assignee

Inventors

Key dates

Filing dateFeb 24, 2022
Grant dateAug 26, 2025
Priority date
Expiry dateAug 29, 2043

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10B51/40

Abstract

A semiconductor device includes a plurality of first conductive lines extending in a first direction and spaced apart from each other in a second direction intersecting the first direction, the first direction and second direction being horizontal directions, a plurality of vertical semiconductor patterns disposed on the plurality of first conductive lines, respectively, a gate electrode crossing the plurality of first conductive lines and penetrating each of the plurality of vertical semiconductor patterns, a ferroelectric pattern between the gate electrode and each of the plurality of vertical semiconductor patterns, and a gate insulating pattern between the ferroelectric pattern and each of the plurality of vertical semiconductor patterns.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.