Devices for automatic cleaning of a monocrystalline silicon bar
US12403511B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2023 |
| Grant date | Sep 2, 2025 |
| Priority date | — |
| Expiry date | Jul 31, 2043 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Provided are automatic cleaning devices for a monocrystalline silicon bar, which include a base frame, a sprayer, a scrubber, and an air-jetter. Bottom of an inner side of the base frame is configured to place a monocrystalline silicon bar. A plurality of groups of the sprayers, a plurality of groups of the scrubbers, and a plurality of groups of the air-jetters are all disposed on side walls and a top surface of the base frame whose bottom of an inner side is removed. The sprayer is configured to spray the monocrystalline silicon bar. The scrubber is configured to scrub the monocrystalline silicon bar. The air-jetter is configured to purge the monocrystalline silicon bar.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.