Phase difference measuring device, beam output apparatus and phase difference measuring method
US12405168B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Feb 16, 2021 |
| Grant date | Sep 2, 2025 |
| Priority date | — |
| Expiry date | Dec 2, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/10061
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A phase difference measuring device is provided with a phase conversion device and a detection device. The phase conversion device converts a first laser beam that passes therethrough so that the first laser beam includes a phase distribution of one cycle in an azimuth direction in a cross section of the first laser beam included in an arbitrary virtual plane perpendicular to an optical axis of the first laser beam. The detection device detects an azimuth angle of an intensity centroid of an interference pattern generated by at least a part of a first laser beam that has passed through the phase conversion device, and a part of a second laser beam that derives from a laser beam as seed light from which the first laser beam derives, of which an optical intensity is same as the at least a part of the first laser beam, and detects an inter-beam phase difference of the second laser beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.