Electrode structure for high-sensitivity protrusion-type pressure sensor and method for manufacturing the same
US12405177B2 · kind B2 · utility
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6Claims
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Key dates
| Filing date | Dec 12, 2022 |
| Grant date | Sep 2, 2025 |
| Priority date | — |
| Expiry date | Jan 12, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D48/50
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Provided are an electrode structural body for a highly sensitive protrusion type pressure sensor and a method for manufacturing the same. According to the electrode structural body of the present invention, an electrode is formed along a protruding structure, so that deformation of the protruding structure may be sufficiently sensed to achieve high sensitivity even in a low pressure range and a polymer layer may be further introduced to the outside of the electrode to achieve excellent stability.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.