Device having an anodic porous region surrounded by a trench having an electrical isolation barrier
US12406811B2 · kind B2 · utility
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15Claims
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Assignee
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Key dates
| Filing date | Jan 12, 2023 |
| Grant date | Sep 2, 2025 |
| Priority date | — |
| Expiry date | Nov 5, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G4/10
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrical device that includes: a metal barrier layer; an anodic porous oxide region on the metal barrier layer; a trench around the anodic porous oxide region reaching the metal barrier layer; a liner at least on a wall of the trench on a side of the anodic porous oxide region forming an electrical isolation barrier and having an opening onto the anodic porous oxide region; a hard mask arranged above the trenches and the liner having an opening onto the anodic porous oxide region. A corresponding manufacturing method is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.