Deposition mask stage, display manufacturing apparatus including the same, and display manufacturing method using the same
US12406870B2 · kind B2 · utility
0Cited by
6References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 1, 2023 |
| Grant date | Sep 2, 2025 |
| Priority date | — |
| Expiry date | Aug 26, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6833
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed is a deposition mask stage comprising a stage frame, chucks combined with the stage frame, and support blocks on a back side of the stage frame. The chucks are spaced apart from each other in a first direction and a second direction that are defined in an extending direction of the stage frame. The first and second directions intersect each other. The support blocks are spaced apart from each other in the first direction and the second direction on the back side of the stage frame.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.