Readout circuit for high-precision vibration sensor
US12407311B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 17, 2023 |
| Grant date | Sep 2, 2025 |
| Priority date | — |
| Expiry date | Jun 3, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03M3/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A readout circuit for a high-precision vibration sensor comprises an on-chip self-test circuit, a low-noise charge amplifier, a correlated double sampling circuit, a PID feedback control circuit, a phase compensation circuit and Sigma-Delta. A self-test signal is amplified by the low-noise charge amplifier, low-frequency noise and offsets are filtered out by the correlated double sampling circuit, then a self-test path and a working path of a vibration sensor are separated in the time domain by the PID feedback control circuit, the phase compensation circuit performs zero compensation and pole compensation on the signal, and Sigma-Delta converts an analog signal into a high-precision digital signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.