Turbomolecular vacuum pump and associated method
US12410805B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 15, 2022 |
| Grant date | Sep 9, 2025 |
| Priority date | — |
| Expiry date | Nov 15, 2042 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF05D2270/303
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A turbomolecular vacuum pump includes a stator, a rotor to rotate inside the stator, and a motor to drive the rotation of the rotor. The turbomolecular vacuum pump further includes a temperature sensor to measure the temperature of the rotor and a creep maintenance meter to determine an incremental change in the creep of the rotor over a predetermined duration from the temperature of the rotor, as measured by the temperature sensor, from the rotational speed of the rotor, from the value of the creep of the rotor, and from the look-up table, to increment the rotor-creep value by the determined creep increment, and to determine, based on the incremented creep value, a data item indicative of the remaining time for which the rotor can run before needing preventive maintenance for creep.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.