Developing device and developing method
US12411423B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 19, 2021 |
| Grant date | Sep 9, 2025 |
| Priority date | — |
| Expiry date | Jul 4, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The developing device comprises: a development chamber that is provided with an air extraction pipeline for extracting air inside the development chamber to outside the development chamber; a carrier that is disposed in the development chamber for supporting a wafer; a plurality of temperature sensors that are disposed on the carrier for detecting temperatures of a plurality of target regions; a plurality of mutually independent air supply pipelines for supplying air to the development chamber, each of the target regions corresponding to at least one air supply pipeline; and a control unit for acquiring measured temperatures of the temperature sensors and calculating current temperatures of the corresponding target regions, and basing on the current temperatures of the target regions to adjust air parameters of the corresponding air supply pipelines, so that the temperatures of the corresponding target regions rest within a preset temperature range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.