Tuning acoustic resonators with back-side coating
US12413196B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 15, 2023 |
| Grant date | Sep 9, 2025 |
| Priority date | — |
| Expiry date | Aug 16, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/0442
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A filter device is provided that includes a substrate and a piezoelectric plate attached to the substrate. A conductor pattern is formed at a first surface of the piezoelectric plate and includes interdigital transducers of series and shunt resonators that each have interleaved fingers at respective diaphragms of the plate suspended. A first dielectric coating layer is formed over the interleaved fingers of the IDTs and on the first surface of the piezoelectric plate; and a second dielectric coating layer is formed on the second surface of the piezoelectric plate that is opposite the first surface. The second dielectric coating layer of the shunt resonator has a greater thickness than a thickness of the at least one second dielectric coating layer of the series resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.