Acoustic wave device, filter, multiplexer, and manufacturing method of acoustic wave device
US12413199B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 29, 2022 |
| Grant date | Sep 9, 2025 |
| Priority date | — |
| Expiry date | Jul 12, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/023
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic wave device includes a substrate, lower and upper electrodes provided over the substrate, a piezoelectric film that is provided over the substrate, is interposed between the lower and upper electrodes, and has a pair of through holes that sandwich a resonance region therebetween in a first direction, are provided along the resonance region, and are connected to an air gap that is formed between the substrate and the lower electrode and overlaps the resonance region in the plan view, the lower and upper electrodes overlapping across the piezoelectric film in the resonance region, and additional films that are not provided in a central region of the resonance region in the plan view and are provided in respective edge regions, which are located on respective sides of the central region in a second direction substantially orthogonal to the first direction in the plan view, of the resonance region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.