Light source apparatus
US12414218B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 31, 2023 |
| Grant date | Sep 9, 2025 |
| Priority date | — |
| Expiry date | Apr 16, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/0082
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A light source apparatus includes a disk-shaped rotation body, a raw material supply mechanism, a chamber body, and a foil trap. The raw material supply mechanism supplies a front surface of the rotation body with liquid raw material that is irradiated with an energy beam to generate plasma. The chamber body includes a beam introduction section that introduces the energy beam, a radiation extraction section that extracts radiation from the plasma that has been generated, and a plasma generation section that accommodates the rotation body. The foil trap includes a shaft member rotatably disposed in the chamber body and a plurality of foils radially arranged around the shaft member, and the plurality of foils is arranged between the rotation body and the radiation extraction section to capture debris that has been generated from the plasma.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.