Rotational and translational micropositioners using deformable microelectromechanical systems
US12418251B2 · kind B2 · utility
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1References
13Claims
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Key dates
| Filing date | Jul 27, 2022 |
| Grant date | Sep 16, 2025 |
| Priority date | — |
| Expiry date | Jul 27, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/2041
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Microelectromechanical systems (MEMS) have found widespread applications across biotechnology, medicine, communications, and consumer electronics. These are typically one-dimensional MEMS (e.g. rotation, linear translation on a single axis) or two-dimensional MEMS (e.g. linear translation in two directions in the plane of the MEMS). It would be beneficial therefore for designers of components, circuits, and systems to exploit MEMS elements that produce both out-of-plane and in-plane motion thereby allowing for novel two-dimensional and three-dimensional MEMS micropositioners.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.