Patent · US Active

Anti-cracking suction device comprising outer cylinder, inner cylinder, suction tube, and first gap between inner and outer cylinders

US12421618B2 · kind B2 · utility

0Cited by
2References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 25, 2022
Grant dateSep 23, 2025
Priority date
Expiry dateNov 25, 2042

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC30B29/06
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

An anti-cracking suction device for Czochralski single crystal is provided, wherein the device includes an outer cylinder, an inner cylinder disposed in the outer cylinder, a suction tube, and a first gap. An upper portion of the suction tube extends into the inner cylinder from a bottom of the outer cylinder, a lower portion of the suction tube is disposed outside the outer cylinder. The first gap is disposed between a bottom of the inner cylinder and the outer cylinder, and is configured to cushion a thermal expansion of the bottom of the inner cylinder to reduce stress at where the suction tube is connected with the inner cylinder, in a case that silicon liquid is sucked into the inner cylinder by the suction tube and accumulated at the bottom of the inner cylinder.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.