Anti-cracking suction device comprising outer cylinder, inner cylinder, suction tube, and first gap between inner and outer cylinders
US12421618B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 25, 2022 |
| Grant date | Sep 23, 2025 |
| Priority date | — |
| Expiry date | Nov 25, 2042 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B29/06
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An anti-cracking suction device for Czochralski single crystal is provided, wherein the device includes an outer cylinder, an inner cylinder disposed in the outer cylinder, a suction tube, and a first gap. An upper portion of the suction tube extends into the inner cylinder from a bottom of the outer cylinder, a lower portion of the suction tube is disposed outside the outer cylinder. The first gap is disposed between a bottom of the inner cylinder and the outer cylinder, and is configured to cushion a thermal expansion of the bottom of the inner cylinder to reduce stress at where the suction tube is connected with the inner cylinder, in a case that silicon liquid is sucked into the inner cylinder by the suction tube and accumulated at the bottom of the inner cylinder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.