Pressure sensor with manufacturing efficiency and structure stability
US12422321B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 5, 2023 |
| Grant date | Sep 23, 2025 |
| Priority date | — |
| Expiry date | May 5, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67253
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is pressure sensor, including top cover assembly, upper seat, movable membrane; each of top and bottom of upper seat is provided with opening, top cover assembly seals opening at top of upper seat, movable membrane seals opening at bottom of upper seat; top cover assembly, upper seat, movable membrane form pressure reference chamber, and pressure sensor detects gas pressure on side of movable membrane away from top cover assembly based on state of movable membrane; at least one gas guide passage is formed at top cover assembly, and is configured to connect pressure reference chamber to outside; top cover assembly includes at least one blocking member configured to seal gas guide passage; and blocking member seals gas guide passage after being heated to temperature higher than preset melting temperature to be at least partially melted and being cooled to solidify. Manufacturing method for pressure sensor is further provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.