Inspection device and inspection method
US12424407B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 8, 2022 |
| Grant date | Sep 23, 2025 |
| Priority date | — |
| Expiry date | Apr 1, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/30488
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An inspection device includes an emission unit of first charging particles. A deflection unit deflects the first charging particles to scan a surface of a target object with the first charging particles. A detection unit detects second charging particles generated from the surface of the target object receiving the first charging particles. An image generation unit generates an image of the surface of the target object based on a detection result of the second charging particles by the detection unit. A control unit controls a scan direction of the first charging particles. A calculation unit detects normal directions to a contour of an uneven portion on the surface of the target object in a first image obtained by scanning in a first scan direction. The calculation unit calculates a frequency of a first angle formed between a reference axis of the first image and a normal direction of each of a plurality of unit regions. The calculation unit determines the normal direction corresponding to a most frequent value of the first angle among the normal directions as a second scan direction. The calculation unit calculates a height of the uneven portion based on a second image obtained b…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.