Ceramic joined body, electrostatic chuck device, and method for producing ceramic joined body
US12424475B2 · kind B2 · utility
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3References
20Claims
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Key dates
| Filing date | Dec 28, 2020 |
| Grant date | Sep 23, 2025 |
| Priority date | — |
| Expiry date | Feb 3, 2042 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2237/72
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A ceramic joined body (1) includes: a pair of ceramic plates (2,3) that include a conductive material; a conductive layer (4) and an insulating layer (5) that are interposed between the pair of ceramic plates (2, 3); and a pair of intermediate layers (6, 7) that are interposed between the pair of ceramic plates (2, 3) and the conductive layer (4) and are in contact with the pair of ceramic plates (2, 3) and the conductive layer (4).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.