Transversely-excited film bulk acoustic resonators with gap dielectric stripes in busbar-electrode gaps
US12424999B2 · kind B2 · utility
0Cited by
33References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 21, 2023 |
| Grant date | Sep 23, 2025 |
| Priority date | — |
| Expiry date | May 26, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/023
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic resonator device includes a substrate having a surface; an 82Y-cut lithium niobate piezoelectric plate attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in an intermediate dielectric layer of the substrate; an interdigital transducer (IDT) at the piezoelectric plate such that interleaved fingers of the IDT are at the diaphragm; and a plurality of stripes of a dielectric material extending over ends of the interleaved fingers and portions of gaps between the ends of the interleaved fingers and opposing busbars of the IDT.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.