Semiconductor structure with semiconductor pillars and method for manufacturing same
US12426232B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 22, 2022 |
| Grant date | Sep 23, 2025 |
| Priority date | — |
| Expiry date | Jan 11, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/0179
Abstract
A semiconductor structure includes: a substrate, a first gate structure, and a second gate structure. The substrate includes: discrete first semiconductor pillars arranged at a top of the substrate and extending in a vertical direction; and a second semiconductor pillar and a third semiconductor pillar extending in the vertical direction, the second and third semiconductor pillars are provided at a top of each first semiconductor pillar. The first gate structure is arranged in a middle region of the first semiconductor pillar and surrounds the first semiconductor pillar. The second gate structure is arranged in a middle region of the second semiconductor pillar and of the third semiconductor pillar, and includes a first ring structure and a second ring structure. The first ring structure surrounds the second semiconductor pillar, and the second ring structure surrounds the third semiconductor pillar.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.