Flexible acoustic-electric substrate and preparation method therefor, and flexible acoustic-electric device
US12426505B2 · kind B2 · utility
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4References
13Claims
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Key dates
| Filing date | May 19, 2020 |
| Grant date | Sep 23, 2025 |
| Priority date | — |
| Expiry date | Jul 9, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/857
Abstract
Embodiments of the present disclosure provide a flexible acoustic-electric substrate and a preparation method thereof, and a flexible acoustic-electric device. The preparation method of a flexible acoustic-electric substrate includes: forming a flexible substrate; forming a plurality of piezoelectric components on the flexible substrate; and forming a plurality of chambers on the flexible substrate in a one-to-one correspondence relationship with the plurality of piezoelectric components, and the plurality of chambers are located on a side of the flexible substrate away from the plurality of piezoelectric components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.