Acoustic wave device with electrode fingers made of an alloy
US12426513B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 13, 2022 |
| Grant date | Sep 23, 2025 |
| Priority date | — |
| Expiry date | Jul 20, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/14538
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic wave device includes an IDT electrode on a piezoelectric layer. The IDT electrode includes first and second electrode fingers made of an alloy film including Al and at least one of Cu, Mg, Ag, or Nd, and an overlap region in which the first and second electrode fingers overlap when viewed in the direction of propagation of acoustic waves. The overlap region includes a central region and first and second edge regions outside the central region on opposite sides in the direction in which the first and second electrode fingers extend. In at least one of the first and second electrode fingers, a concentration of the at least one of Cu, Mg, Ag, or Nd in at least a portion of the first and second edge regions is higher than that in the central region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.