CMUT transducer
US12427544B2 · kind B2 · utility
0Cited by
2References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 25, 2020 |
| Grant date | Sep 30, 2025 |
| Priority date | — |
| Expiry date | Sep 29, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB06B1/0292
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present disclosure relates to a CMUT transducer (200) comprising: a substrate (101) coated with a dielectric layer (103); a cavity (105) formed in the dielectric layer (103); a conductive or semiconductor membrane (107) suspended above the cavity (105); and a dielectric coating (104) arranged on an upper surface of the substrate (101) at the bottom of the cavity or on a lower surface of the membrane at the top of the cavity and extending, in top view, on the most part of the surface of the cavity (105), wherein the dielectric coating (104) is structured opposite the cavity (105).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.