Scanning electron microscope and map display method for absorption edge structure
US12429442B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 9, 2022 |
| Grant date | Sep 30, 2025 |
| Priority date | — |
| Expiry date | Nov 15, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2445
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electron beam accelerated using a first acceleration voltage is applied to respective positions on a sample to obtain spectra A at the respective positions, and an electron beam accelerated using a second acceleration voltage different from the first acceleration voltage is applied to the respective positions on the sample to obtain spectra B at the respective positions. Then, a spectral ratio A/B of the spectra is calculated at each of the positions to generate a waveform representing the spectral ratio A/B. The value of a spectral ratio A/B in an energy region of interest is extracted from each of the waveforms. The extracted values are mapped onto points corresponding to the respective positions on the sample, whereby a spectral map is generated. The spectral map is displayed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.