Electrical characteristic parameter inspection apparatus, electrical characteristic parameter inspection method, and storage medium
US12429447B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 15, 2023 |
| Grant date | Sep 30, 2025 |
| Priority date | — |
| Expiry date | Nov 6, 2043 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/026
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electrical characteristic parameter inspection apparatus includes multiple sensors to be arranged on or over an object and a hardware processor. The hardware processor selects multiple predetermined selection patterns, each of the selection patterns including a sensor pair, the sensor pair including two or more sensors among the multiple sensors; measures electrical characteristic parameters for the respective selection patterns, the electrical characteristic parameters being output from the sensors included in the selection patterns; and analyzes the electrical characteristic parameters measured for the respective selection patterns.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.