Transport device inspection system including diagnostic server and method of operation thereof
US12429845B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 15, 2022 |
| Grant date | Sep 30, 2025 |
| Priority date | — |
| Expiry date | May 20, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67733
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A transport device inspection system includes a plurality of transport devices configured to move along a transport path, a diagnostic server configured to create inspection schedule information for the plurality of transport devices, an inspector configured to receive the inspection schedule information from the diagnostic server and to sequentially inspect the plurality of transport devices in accordance with the inspection schedule information, and a transport device controller configured to receive the inspection schedule information from the inspector and to control the plurality of transport devices to sequentially move to an inspection position in accordance with the inspection schedule information.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.