Cell-to-cell comparison method
US12430749B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2022 |
| Grant date | Sep 30, 2025 |
| Priority date | — |
| Expiry date | Jul 4, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A cell-to-cell comparison method for inspecting a defect in a subject in which unit cells that may be expressed by a two-dimensional (2D) vector are periodically arranged according to an embodiment of the present invention includes: obtaining an image of the subject including an array of the unit cells; generating a tile that is a set of pixels corresponding to the same position in a plurality of unit cells within the array in the image; determining a gray level of each of a plurality of pixels within the tile; and determining whether the plurality of pixels within the tile are defective on the basis of the determined gray level of each of the plurality of pixels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.