Charged particle beam apparatus
US3937958A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 31, 1975 |
| Grant date | Feb 10, 1976 |
| Priority date | — |
| Expiry date | Mar 31, 1995 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/063
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle beam (e.g., ions or electrons) apparatus including two electrostatic focusing lenses and an electrode having a diameter limiting aperture positioned between the lenses is further provided with two electrode assemblies which interact with an extractor electrode and with a source of charged particles such that the trajectories of the particles in the beam passing through the second of the two assemblies are substantially parallel. This feature and other disclosed improvements facilitate the production of a substantially monoenergetic beam which under a first set of conditions can be focused to provide a small-diameter, spherical-aberration limited beam and which under another set of conditions, can be focused to provide a high current beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.