Apparatus for relatively positioning a plurality of objects by the use of a scanning optoelectric microscope
US3943359A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 17, 1974 |
| Grant date | Mar 9, 1976 |
| Priority date | — |
| Expiry date | Jun 17, 1994 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/70
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A positioning apparatus comprising marks for position detection which are respectively formed on a plurality of objects, means to cause optical images of the position detecting marks from the respective objects to reach a scanning mechanism, the scanning mechanism scanning the optical images at the same time, a plurality of detectors, each of which consists of a slit and a photoelectric element, the slits being arranged on an identical optical axis so that the optical images of the position detecting marks of the respective objects as scanned by the scanning mechanism may be detected respectively and individually, and a driving device which moves one of the plurality of objects on the basis of signals from the detectors, to effect the relative positioning of the plurality of objects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.