Polymerization compositions and processes having polymeric binding agents
US3953309A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 3, 1974 |
| Grant date | Apr 27, 1976 |
| Priority date | — |
| Expiry date | Dec 3, 1994 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31696
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
A process for making photoresists which comprises preparing a photopolymerizable layer of an addition polymer, an initiator system, and a polymerizable inhibitor, using a preformed macromolecular binding agent which is a copolymer of a first monomeric material containing one or more non-acidic vinyl-type compounds and a second monomeric material containing one or more alpha,beta-unsaturated carboxyl-containing monomers, wherein the ratio of the first monomer to the unsaturated carboxylic-containing monomer is sufficient to render the binding agent soluble in a dilute alkaline solution; thereafter exposing a portion of the photopolymerizable layer to actinic light; and washing said layer with a dilute aqueous alkaline solution to dissolve the unexposed portion of the photopolymerizable layer. Preferably, the photopolymerizable layer is supported on a metallic substrate prior to said washing step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.