Interferometric apparatus
US3958884A · kind A · utility
36Cited by
2References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 16, 1975 |
| Grant date | May 25, 1976 |
| Priority date | — |
| Expiry date | Apr 16, 1995 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An interferometric apparatus comprises an optical assembly which simultaneously directs two mutually coherent light pencils at different respective angles of incidence towards a point on a surface and receives the reflected light pencils therefrom. The assembly includes optical means bringing the reflected pencils at least partially into coincidence so that they can interfere optically in a manner varying with variation in the distance of points on the surface from a reference plane. The assembly may be combined with a microscope to form a "pupil-shearing micro-interferometer" for investigating surface topography.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.