Method for the preparation of thin layers of tungsten and molybdenum
US3963839A · kind A · utility
3Cited by
3References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 29, 1974 |
| Grant date | Jun 15, 1976 |
| Priority date | — |
| Expiry date | Aug 29, 1994 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/06
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Preparation of thin layers of tungsten or molybdenum on a highly temperature-resistant layer substrate by thermal evaporation in a high vacuum, where WO.sub.3 or MoO.sub.3, respectively, is evaporated and the layer substrate is heated so that the oxides are decomposed and a pure tungsten or molybdenum layer is deposited on the layer substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.