Turbomolecular vacuum pump having a gas bearing-supported rotor
US3969042A · kind A · utility
34Cited by
6References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 25, 1974 |
| Grant date | Jul 13, 1976 |
| Priority date | — |
| Expiry date | Nov 25, 1994 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C2360/45
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A turbomolecular vacuum pump has a stator, a rotor having a vertical axis of rotation and disposed in the stator; a drive motor for rotating the rotor; a downwardly open, axially extending chamber in the rotor; a vertically upwardly oriented, stationarily supported stub shaft projecting into the rotor chamber; and axial, as well as radial gas bearings disposed within the rotor chamber for generating gas cushions between the rotor and the stub shaft.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.