Method for the production of anti-reflection coatings on optical elements made of transparent organic polymers

US3984581A · kind A · utility

Assignee

• Carl Zeiss Stiftung · DE

Inventors

• Hermann Dobler · Aalen, DE
• Rudolf Eichinger

Key dates

• Filing date: Oct 22, 1974
• Grant date: Oct 5, 1976
• Expiry date: Oct 22, 1994

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B1/115
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A method for the production, without thermal treatment, of an anti-reflection coating on surfaces of optical elements of transparent, thermally sensitive material such as organic polymeric plastic material which comprises coating the surface with a layer of silicon oxide by vaporizing said silicon oxide by applying the energy of an electron beam thereto under vacuum in such manner that the vaporized molecules are ionized by said beam and are deposited on said elements in ionized condition. A multi-layer coating may then be applied by depositing with an increasing rate on said coating a layer of a substance of higher refractive index than that of said plastic material while continuing the deposition of the silicon oxide, and then depositing thereon a final layer of anti-reflection material such as silicon oxide. The substance of higher refractive index may an oxide of cerium, tantalum, titanium or zirconium.