Patent · US Expired

Method of manufacturing semiconductor camera tube targets

US3986761A · kind A · utility

1Cited by
2References
8Claims
0Family size

Assignee

Inventor

Key dates

Filing dateAug 5, 1965
Grant dateOct 19, 1976
Priority date
Expiry dateAug 5, 1985

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J9/233
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

1. The method of manufacturing a camera tube target from a semiconductor material for placement in a camera tube prior to degassing thereof comprising the steps of initially doping the semiconductor material with an impurity for rendering it sensitive to a desired radiation spectrum but in a quantity less than required for sensitivity in said desired radiation spectrum; annealing said semiconductor material at a temperature greater than the subsequent degassing temperature for a period of time effective to increase the impurity concentration to a level sufficient to render the semicoductor material sensitive to the desired radiation spectrum, said concentration being substantially more stable at lower degassing temperatures than the initial impurity concentration; positioning said semiconductor material as a target within a radiation sensitive camera tube enclosure; and degassing said camera tube enclosure by heating said enclosure including said target for driving the gas from said enclosure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.