Apparatus for transferring articles through various processing sectors of a manufacturing system
US3995206A · kind A · utility
17Cited by
9References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 6, 1974 |
| Grant date | Nov 30, 1976 |
| Priority date | — |
| Expiry date | Jun 6, 1994 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67727
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A material transfer apparatus which includes a carriage whose movement is controlled along a path between specified locations thereon. The carriage includes means for dynamically indicating its present location on the path which is compared with a specified new location to provide a difference drive for moving the carriage as required.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.