Patent · US Expired

Barium aluminoborosilicate glass-ceramics for semiconductor doping

US3998667A · kind A · utility

6Cited by
4References
5Claims
0Family size

Assignee

Inventor

Key dates

Filing dateDec 19, 1975
Grant dateDec 21, 1976
Priority date
Expiry dateDec 19, 1995

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S252/951
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

Disclosed are B.sub.2 O.sub.3 -containing glass-ceramic bodies made by in situ thermal crystallization of glasses and useful as a host for diffusion doping of semiconductors by the vapor phase transport of B.sub.2 O.sub.3 to the semiconductor from the glass-ceramic which in mole percent consists essentially of over 40 and up to 60 SiO.sub.2, 10 to 30 Al.sub.2 O.sub.3, 20 to 40 B.sub.2 O.sub.3 and 3 to 20 alkaline earth oxides including 1 to 15 BaO wherein the ratio of Al.sub.2 O.sub.3 to alkaline earth oxides is from 1.5 to 4.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.